|
週次 |
日期 |
單元主題 |
|
Week 1 |
9/14 |
Introduction of microsystem and its applications |
|
Week 2 |
9/21 |
Introduction of microsystem and its applications |
|
Week 3 |
9/28 |
Introduction of microsystem and its applications |
|
Week 4 |
10/05 |
Review of Standard VLSI Microfabrication, Processes in CMOS |
|
Week 5 |
10/12 |
Foundary process |
|
Week 6 |
10/19 |
Micromachining Process |
|
Week 7 |
10/26 |
Cleanroom field visit |
|
Week 8 |
11/02 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
|
Week 9 |
11/09 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
|
Week 10 |
11/16 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
|
Week 11 |
11/23 |
Micro sensors: Physical and Chemical |
|
Week 12 |
11/30 |
Micro sensors: Physical and Chemical |
|
Week 13 |
12/07 |
Micro sensors: Physical and Chemical |
|
Week 14 |
12/14 |
Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
|
|
Week 15 |
12/21 |
Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
|
|
Week 16 |
12/28 |
Biosensor |
|
Week 17 |
1/04 |
Biosnesor |